I&EC 201 |
| Hazardous gases (e.g. due to toxicity, flammability, reactivity) are commonly packaged in high pressure cylinders, either as pure gases or as part of a mixture in an inert gas. An unintended or uncontrollable release could result in significant injury or death. The ion implant segment of the electronics industry has adopted the use of inherently safer gas sources in which gases are stored in standard cylinders containing a zeolite or carbon-based adsorbent. The cylinders contain subatmospheric pressures of toxic gases that are delivered to a process under vacuum. We have developed subatmospheric systems based on ionic liquids for storing phosphine (PH3) and boron trifluoride (BF3). Ionic liquids have ideal properties for reversibly storing gases through chemical complexation. Due to the superior heat transfer capability of ionic liquids, gases are easier to load and deliver compared to solid adsorption-based systems. We have developed full scale packages (2.2 L cylinder) that exhibit excellent gas evolution rates, evolved gas purity, and long-term gas/liquid stability. Commercial PH3 and BF3 packages for manufacturing semiconductor devices have been fully qualified at several production facilities. |
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Ionic Liquids: Not Just Solvents Anymore OR Ionic Liquids: Parallel Futures (Sponsored by Green Chemistry and Engineering, Separation Science and Technology and Novel Chemistry with Industrial Applications Sub-Divisions)
1:30 PM-5:45 PM, Monday, 27 March 2006 Georgia World Congress Center -- B314, Oral
Division of Industrial and Engineering Chemistry |